JPH0248422Y2 - - Google Patents

Info

Publication number
JPH0248422Y2
JPH0248422Y2 JP1985175891U JP17589185U JPH0248422Y2 JP H0248422 Y2 JPH0248422 Y2 JP H0248422Y2 JP 1985175891 U JP1985175891 U JP 1985175891U JP 17589185 U JP17589185 U JP 17589185U JP H0248422 Y2 JPH0248422 Y2 JP H0248422Y2
Authority
JP
Japan
Prior art keywords
wall member
substrate
outer peripheral
peripheral wall
bottom wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985175891U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6283866U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985175891U priority Critical patent/JPH0248422Y2/ja
Publication of JPS6283866U publication Critical patent/JPS6283866U/ja
Application granted granted Critical
Publication of JPH0248422Y2 publication Critical patent/JPH0248422Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1985175891U 1985-11-14 1985-11-14 Expired JPH0248422Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985175891U JPH0248422Y2 (en]) 1985-11-14 1985-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985175891U JPH0248422Y2 (en]) 1985-11-14 1985-11-14

Publications (2)

Publication Number Publication Date
JPS6283866U JPS6283866U (en]) 1987-05-28
JPH0248422Y2 true JPH0248422Y2 (en]) 1990-12-19

Family

ID=31115634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985175891U Expired JPH0248422Y2 (en]) 1985-11-14 1985-11-14

Country Status (1)

Country Link
JP (1) JPH0248422Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4691385B2 (ja) * 2005-04-15 2011-06-01 アルバック九州株式会社 真空成膜装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148489A (en) * 1976-06-04 1977-12-09 Nippon Sheet Glass Co Ltd Vacuum evaporation process
JPS5623671U (en]) * 1979-07-30 1981-03-03
JPS57134559A (en) * 1981-02-12 1982-08-19 Toyota Central Res & Dev Lab Inc Physical vapor deposition device

Also Published As

Publication number Publication date
JPS6283866U (en]) 1987-05-28

Similar Documents

Publication Publication Date Title
KR910016963A (ko) 반응성 이온 에칭 장치 및 방법
JPH0248422Y2 (en])
US6136167A (en) Portable apparatus for thin deposition
JP3706510B2 (ja) プラズマｃｖｄ装置における温度制御方法
JPH04210466A (ja) 真空成膜装置
JPH0313578A (ja) 薄膜形成装置
JP2641463B2 (ja) プラズマ処理装置
JPS633085Y2 (en])
JPH027433Y2 (en])
JPS6123011Y2 (en])
JPH0397855A (ja) スパッタリング装置
JPS61257469A (ja) 薄膜形成方法
KR970002431B1 (ko) 반도체 제조공정 체임버(chamber)의 실링(sealing)장치
JPH0530355Y2 (en])
JPH0139712Y2 (en])
JPH0519330Y2 (en])
JP2739173B2 (ja) 気相成長装置
JPH058673Y2 (en])
JPS6163833U (en])
JPS6265318A (ja) 真空蒸着における基板のクリ−ニング方法
JPS63283737A (ja) 真空用反応容器
JP3401104B2 (ja) 半導体成膜装置
JPH0350723A (ja) プラズマエッチング装置
JPH08120454A (ja) 基板両面の同時薄膜形成方法
JPH01177502A (ja) アルミニウム反射薄膜の製造方法